MSB Series Alabọde Igbohunsafẹfẹ Sputtering Power Ipese

Apejuwe kukuru:

Ipese agbara RHH jara RF da lori imọ-ẹrọ iran RF ti o dagba lati pese awọn alabara pẹlu ipese agbara RF pẹlu agbara nla, konge giga ati idahun iyara.Pẹlu alakoso le ti wa ni ṣeto, pulse controllable, oni yiyi ati awọn miiran awọn iṣẹ.Awọn aaye to wulo: ile-iṣẹ fọtovoltaic, ile-iṣẹ ifihan nronu alapin, ile-iṣẹ semikondokito, ile-iṣẹ kemikali, yàrá, iwadii imọ-jinlẹ, iṣelọpọ, ati bẹbẹ lọ.

Awọn ilana ti o wulo: pilasima imudara ikemi alumọni (PECVD), pilasima etching, mimọ pilasima, orisun ion igbohunsafẹfẹ redio, itankale pilasima, sputtering polymerization pilasima, sputtering ifaseyin, bbl

Alaye ọja

ọja Tags

Fi imeeli ranṣẹ si wa

Awọn ẹya ara ẹrọ

● Idaji-biriki ati agbeko òke aza

● Gba iṣakoso oni-nọmba ni kikun, pẹlu irọrun ati akojọ aṣayan iṣẹ ọlọrọ

● Ṣiṣatunṣe igbohunsafẹfẹ, pulse ati awọn iṣẹ amuṣiṣẹpọ pulse

● Pẹlu iṣẹ amuṣiṣẹpọ alakoso CEX

● Iṣẹ aabo pipe

Alaye ọja

Iṣawọle	Foliteji titẹ sii: AC220V± 10% 3ΦAC380V± 5%(Awọn alaye pataki le ṣe adani)
Iṣawọle	Igbohunsafẹfẹ igbewọle: 47 ~ 63Hz
Abajade	Igbohunsafẹfẹ ijade: 13.56MHz,27.12MHz,40.68MHz
	Iwọn atunṣe: ± 5%
	Agbara ti njade: 1.5 ~ 5kW
	Iwọn ilana ti agbara iṣẹjade: 1 ~ 100%
	Imujade ti njade: 50Ω+j0
	Ni wiwo o wu: Iru N
	O wu mode: lemọlemọfún, pulse
	Pulse igbohunsafẹfẹ: 100Hz ~ 100kHz
	Ojuse: 5 ~ 95%
Atọka iṣẹ	agbara ifosiwewe: 0,98
	Iduroṣinṣin igbagbogbo: ± 0.005%
	Ṣiṣe: 75% (ni iṣẹjade ti wọn ṣe)
	Ti irẹpọ: -45dBc
	Sina: \| 50dBc
	Ni wiwo iṣakoso ita: opoiye afọwọṣe, ibaraẹnisọrọ ati amuṣiṣẹpọ
	Ipo ibaraẹnisọrọ: Standard RS485 ibaraẹnisọrọ ni wiwo;Iyan Ether CAT, Ethernet ile-iṣẹ, ati bẹbẹ lọ.
Akiyesi: ọja naa tẹsiwaju lati ṣe imotuntun ati iṣẹ naa tẹsiwaju lati ni ilọsiwaju.Apejuwe paramita yii jẹ fun itọkasi nikan.